1131_MEMS Technology and Applications_338087
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Course Intro

Course Resources

  • Chapter 1_new
  • 微機電系統_Ch1
  • 微機電系統_Ch2
  • 電學與機械基本理論_Ch3
  • 體型微加工與非等向性蝕刻_Ch10
  • KE Petersen_Silicon_as_a_mechanical_material
  • 面型微加工技術_Ch11
  • Ch 10_FabBulk_Solution
  • 113_Term project報告_準備說明
  • 期末報告範例_壓電感測器設計
  • Comsol 6.3軟體下載流程
  • COMSOL v6.3 新安裝步驟
  • COMSOL v6.3 更換授權步驟20241211
  • COMSOL 6.X 軟體_學習資源
  • COMSOL 6.3 軟體License序號及說明
Teacher / 呂志誠

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