1111_MEMS Technology and Applications_309524
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Course Intro

Course Resources

  • Ch_1_new
  • Ch2_蝕刻
  • Ch2_補充
  • 微機電系統_Ch2
  • 微機電系統Ch1
  • Silicon_as_a_mechanical_material
  • 微機電系統_Ch3
  • 微機電系統_Ch10
  • [錄]10/19 10191314
  • [錄]10/19 10191416
  • [錄]10/26 10261317
  • [錄]1102 course 11021319
  • 微機電系統_Ch11
  • SystemModeling_補充章節
  • Ch 10_FabBulk_Solution
  • Ch 11_FabSurface_Solution
  • Paper review_111
  • CH6壓阻式感測器
  • 電學與機械基本理論_Ch3
  • 111_Term Project.期末專題報告說明
  • COMSOL 6.1 軟體下載須知
Teacher / 呂志誠

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